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Synthesis of Tin Oxide Thin Films by Pulsed Laser Deposition Using SnO2Targets

Published online by Cambridge University Press:  21 March 2011

Yoshiaki Suda ,
Hiroharu Kawasaki ,
Kazuya Doi ,
Jun Nanba ,
Kenji Wada ,
Kenji Ebihara  and
Tamiko Ohshima
Yoshiaki Suda
Affiliation:
Department of Electrical Engineering, Sasebo National College of Technology, Okishin 1-1, Sasebo, Nagasaki, 857-1193, Japan
Hiroharu Kawasaki
Affiliation:
Department of Electrical Engineering, Sasebo National College of Technology, Okishin 1-1, Sasebo, Nagasaki, 857-1193, Japan
Kazuya Doi
Affiliation:
Department of Electrical Engineering, Sasebo National College of Technology, Okishin 1-1, Sasebo, Nagasaki, 857-1193, Japan
Jun Nanba
Affiliation:
Department of Electrical Engineering, Sasebo National College of Technology, Okishin 1-1, Sasebo, Nagasaki, 857-1193, Japan
Kenji Wada
Affiliation:
Department of Chemistry and Biotechnology, Sasebo National College of Technology, Okishin 1-1, Sasebo, Nagasaki, 857-1193, Japan
Kenji Ebihara
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami 2-39-1, Kumamoto, 860-0862, Japan
Tamiko Ohshima
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami 2-39-1, Kumamoto, 860-0862, Japan
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Abstract

Tin oxide (SnO2) thin films have been grown on Si (100) and Al2O3 substrates by pulsed Nd:YAG (532nm) and KrF excimer (248 nm) laser deposition methods using SnO2 targets. X-ray diffraction measurement showed that the almost amorphous microstructure transformed into a crystalline SnO2 phase and preferred orientation varied from (101) to (110) on Si (100) with increasing oxygen gas pressure. This result suggests that oxygen gas pressure affects the phase formation, crystalline structure and preferred orientation of the films. Gas sensing properties of SnO2 thin films by PLD method were also investigated over the temperature range 300 – 600°C, using 0.31vol%H2 as a test gas. The oxygen gas pressure results in a notable change in gas sensing properties of SnO2 thin films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 672: Symposium O – Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures , 2001 , O100.1
Copyright
Copyright © Materials Research Society 2001

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