Hostname: page-component-7bb8b95d7b-495rp Total loading time: 0 Render date: 2024-09-18T12:11:43.308Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis and Characterization of Nitrogen Containing Diamondlike Carbon Films made by ion Beam Deposition

Published online by Cambridge University Press:  22 February 2011

Jeansong Shiao ,
Christian A. Zorman  and
Richard W. Hoffman
Jeansong Shiao*
Affiliation:
Department of Physics, Case Western Reserve University, Cleveland, OH 44106
Christian A. Zorman
Affiliation:
Department of Physics, Case Western Reserve University, Cleveland, OH 44106
Richard W. Hoffman
Affiliation:
Department of Physics, Case Western Reserve University, Cleveland, OH 44106
*
Author to whom correspondence should be addressed. Current address: 5031 N. Sedgewick Road, Lyndhurst, OH 44124, USA.
Get access

Abstract

Hydrogenated and nonhydrogenated nitrogen containing diamondlike carbon films (NDLC including a-C:N and a-C:N:H) were made in a dual ion beam deposition system. The asdeposited films were characterized by Raman spectroscopy, Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERD). The compositional stability of the films at temperatures up to 550°C was examined in situ by both RBS and ERD using a heated sample stage in the scattering chamber. The addition of nitrogen altered the Raman parameters when compared with conventional DLC. At elevated temperatures, the a-C:N films do not suffer nitrogen loss; however, the a-C:N:H films undergo nitrogen and hydrogen loss at 400°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 349: Symposium T – Novel Forms of Carbon II , 1994 , 465
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Liu, A. Y. and Cohen, M. L., Science 245, 841 (1989).Google Scholar
2. Grill, A. and Patel, V., Diamond Films and Technology 2, 61 (1992).Google Scholar
3. Kaufman, J. H., Metin, S. and Saperstein, D. D., Phys. Rev. B 39, 13053 (1989).Google Scholar
4. Yu, K. M., Cohen, M. L., Hailer, E. E., Hansen, W. L., Liu, A. Y. and Wu, I. C., Phys. Rev. B 49, 5034 (1994).Google Scholar
5. Chen, M. Y., Lin, X., Dravid, V. P., Chung, Y. W., Wong, M. S. and Sproul, W. D., Surface and Coating Technology 54/55, 360 (1992).Google Scholar
6. Shiao, Jeansong, Ph.D. Dissertation, Case Western Reserve University, 1993.Google Scholar
7. Zorman, C. A., Shiao, J. and Hoffman, R. W., Surface and Interface Analysis, Accepted for publication in Vol 21, 1994.Google Scholar
8. Niu, C., Liu, Y. Z. and Lieber, C. M., Science 261, 334 (1993).Google Scholar
9. Yeh, T., Lin, C., Sivertsen, J. and Judy, J. H., J. of Magnetism and Magnetic Materials 120, 314 (1993).Google Scholar
10. Grill, A. and Patel, V., Diamond and Related Materials 2, 1519 (1993).Google Scholar
11. Franceschini, D. F., Achete, C. A. and Freire, F. L. Jr., Appl. Phys. Lett. 60, 3229 (1992).Google Scholar
12. Ricci, M., Trinquecoste, M., Auguste, F., Canet, R., Delhaes, P., Guimon, C., Pfister-Guillouzo, G., Nysten, B. and Issi, J. P., J. Mater. Res. 8, 480 (1993).Google Scholar