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Surface Smoothing Process of YBa2Cu3O7−x Thin Film for Fabrication of Superconducting Multi-Chip Modules
Published online by Cambridge University Press: 21 February 2011
Abstract
In this paper, we report the development of surface smoothing process for YB2CU3O7. x (YBCO) films. The SrTi03/YBCO interface characteristics were investigated as functions of polishing agent and polishing time. It was found that the 7% HF solution gave the best results both in structural and electrical properties. The leakage current through the SrTiÛ3 film grown on polished YBCO was reduced to about 3 orders of magnitude. The dielectric constant was also increased from 110 to over 300. The superconducting properties of the YBCO bottom layer degraded insignificantly after undertaking the surface smoothing process and the overlayer growth of STO. This surface smoothing process without post treatment is suitable for subsequent growth of epitaxial STO films and the fabrication of MCM’s.
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- Copyright © Materials Research Society 1994