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Surface Modification of Polytetrafluoroethylene and the Deposition of Copper Films

Published online by Cambridge University Press:  15 February 2011

Wenbiao Jiang ,
M. Grant Norton  and
J. Thomas Dickinson
Wenbiao Jiang
Affiliation:
Department of Mechanical and Materials Engineering Washington State University, Pullman, WA 99164
M. Grant Norton
Affiliation:
Department of Mechanical and Materials Engineering Washington State University, Pullman, WA 99164
J. Thomas Dickinson
Affiliation:
Department of Physics Washington State University, Pullman, WA 99164
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Abstract

Enhancement of the adhesion of thin copper films on polytetrafluoroethylene substrates was found when the substrate surface was irradiated with a pulsed UV excimer laser prior to metal deposition. The interaction between the laser and the polymer was examined by characterizing the neutral and charged species emitted from the surface during irradiation. The nature of the species emitted indicates that significant chemical modification of the polymer surface occurs. In addition to chemical modification, the interaction with the laser also alters the surface morphology of the polymer. Irradiation at fluences of ∼ 0.6 J/cm2 results in an overall planarization of the surface, whilst irradiation at higher fluences results in the formation and enlargement of voids and localized melting.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 304: Symposium H – Polymer/Inorganic Interfaces , 1993 , 97
Copyright
Copyright © Materials Research Society 1993

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