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Superconducting YBaCuO thin Films by Cu-Ion Implantation

Published online by Cambridge University Press:  26 February 2011

Kevin M. Hubbard ,
Nicole Bordes ,
Michael Nastasi  and
Joseph R. Tesmer
Kevin M. Hubbard
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
Nicole Bordes
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
Michael Nastasi
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
Joseph R. Tesmer
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

We have investigated the fabrication of thin-film superconductors by Cu-ion implantation into initially Cu-deficient Y(BaF2)Cu thin films. The precursor films were co-evaporated on SrTiO3 substrates, and subsequently implanted to various doses with 400 keV 63Cu2+. Implantations were preformed at both LN2 temperature and at 380°C. The films were post-annealed in oxygen, and characterized as a function of dose by four-point probe analysis, X-ray diffraction, ion-beam backscattering and channeling, and scanning electron microscopy. It was found that a significant improvement in film quality could be achieved by heating the films to 380°C during the implantation. The best films became fully superconducting at 60–70 K, and exhibited good metallic R vs. T. behavior in the normal state.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 313
Copyright
Copyright © Materials Research Society 1991

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