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Study of Thin Film Ferroelectric Superlattices

Published online by Cambridge University Press:  10 February 2011

Y. Kim ,
A. Erbil ,
E.W. Thomas ,
A. Kushwaha  and
R. Gerhardt
Y. Kim
Affiliation:
School of Physics; School of Materials Science & Engineering, Georgia Institute of Technology, Atlanta, GA 30332.
A. Erbil
Affiliation:
School of Physics; School of Materials Science & Engineering, Georgia Institute of Technology, Atlanta, GA 30332.
E.W. Thomas
Affiliation:
School of Physics; School of Materials Science & Engineering, Georgia Institute of Technology, Atlanta, GA 30332.
A. Kushwaha
Affiliation:
School of Physics; School of Materials Science & Engineering, Georgia Institute of Technology, Atlanta, GA 30332.
R. Gerhardt
Affiliation:
School of Physics; School of Materials Science & Engineering, Georgia Institute of Technology, Atlanta, GA 30332.
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Abstract

The study of ferroelectric thin films has evoked special interest owing to their numerous applications. In this study, epitaxial or highly oriented PbTiO3/PLT (Lead Titanate / La modified Lead Titanate) ferroelectric superlattice thin films were grown by the metalorganic chemical vapor deposition (MOCVD) technique. Compositional modulation by Secondary Ion Mass Spectroscopy (SIMS) established the nature of these films as desirable for high quality device applications. The thickness and the refractive index of each film was determined by using a prism coupler. The dielectric behavior of these films was studied as a function of frequency.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 339
Copyright
Copyright © Materials Research Society 1996

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