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Structure of Amorphous A12O3 Produced by Ion Implantation
Published online by Cambridge University Press: 25 February 2011
Abstract
The amorphous state can be produced in α-Al2O3 by ion beam induced displacements at 77 K or by displacements combined with chemical effects at room temperature. Progress toward understanding the amorphization process has been made from studies of the short-range order, electronic charge on implanted species, and the critical composition for amorphization. Results are presented for implantation of Al + O in the stoichiometric ratio, zirconium, iron, and tin.
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- Copyright © Materials Research Society 1990
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