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Spectral Sensitivities of X-Ray Diffraction and Atomic Force Microscopy to the Roughness of Si/SiO2 Interfaces
Published online by Cambridge University Press: 21 February 2011
Abstract
Root mean square measurements of the Si(001)/SiO2 interface have been performed with a variety of techniques. Using X-ray diffraction to represent the diffraction class of techniques, and atomic force microscopy to represent imaging techniques, we discuss the effect that limitations of each technique have on experimental results.
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- Copyright © Materials Research Society 1995
References
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