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Solubility of Hydrogen in Amorphous Silicon

Published online by Cambridge University Press:  15 February 2011

J. Daey Ouwens  and
R. E. I. Schropp
J. Daey Ouwens
Affiliation:
Debye Institute, Utrecht University, P.O. Box 80000, 3508 TA Utrecht, The Netherlands
R. E. I. Schropp
Affiliation:
Debye Institute, Utrecht University, P.O. Box 80000, 3508 TA Utrecht, The Netherlands
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Abstract

We demonstrate that the exisiting ambiguity between the Nuclear Magnetic Resonance (NMR) and the infra-red (IR) interpretation of the density of clustered hydrogen can be removed by monitoring the effective charge of the silicon hydrogen vibrations in a-Si:H versus the hydrogen content. By monitoring the peak position of the low frequency component (2000 cm−1 mode) of the stretching doublet, we conclude that the 2000 cm−1 and the 2100 cm−1 modes can be uniquely attributed to the monohydride and multihydride bonding configurations, respectively.

We show that the parameters describing the IR spectrum depend on the hydrogen content only and do not depend on the deposition technique, deposition conditions or post-deposition annealing treatment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 377: Symposium A – Amorphous Silicon Technology 1995 , 1995 , 419
Copyright
Copyright © Materials Research Society 1995

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References

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