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Small-Angle X-Ray Scattering from Light Emitting Porous Silicon and Siloxene

Published online by Cambridge University Press:  28 February 2011

H. Franz ,
V. Petrova-Koch ,
T. Muschik ,
V. Lehmann  and
J. Peisl
H. Franz*
Affiliation:
University of Munich, Sektion Physik, Munich, Germany
V. Petrova-Koch
Affiliation:
Technische Universität Munich, Garching, Germany
T. Muschik
Affiliation:
Technische Universität Munich, Garching, Germany
V. Lehmann
Affiliation:
Siemens AG, Munich, Germany.
J. Peisl
Affiliation:
University of Munich, Sektion Physik, Munich, Germany
*
a: new address: Instituto di Scienze Fisiche, Universita degli Studidi Ancona, Ancona, Italy
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Abstract

We studied the microstructure of two types of light emitting porous silicon (PS), as-etched and rapid thermal oxidized and of material prepared according to the siloxene recipe by Small-Angle X-Ray Scattering (SAXS). In all three types of samples we found particles with nanometer dimensions. The average particle size in as-etched PS is ingood agreement with results achieved by TEM and X-ray diffraction. Shape analysis shows, that the PS skeleton consists of cylindrical shaped particles with an average heigth of 20Å and a diameter of 40 Å.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 283: Symposium F – Microcrystalline Semiconductors–Materials Science and Devices , 1992 , 133
Copyright
Copyright © Materials Research Society 1993

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References

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