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Simulation of Gas Phase Clustering of Nanocrystals in Sputter Discharges

Published online by Cambridge University Press:  28 February 2011

Seung J. Choi  and
Mark J. Kushner
Seung J. Choi
Affiliation:
University of Illinois. Department of Electrical and Computer Engineering, 1406 W. Green St., Urbana, IL 61801
Mark J. Kushner
Affiliation:
University of Illinois. Department of Electrical and Computer Engineering, 1406 W. Green St., Urbana, IL 61801
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Abstract

The preparation of nanocrystalline particles or clusters (sizes 1–50 nm) is of interest to the study of small systems and for use in sintering or compacting of high purity bulk materials. Recently, a method whereby these crystals can be fabricated using a sputter discharge has been reported. We have developed a computer model to simulate the formation of homogeneous (e.g., Si, Cu, Ti) gas phase clusters in these devices as precursors to larger nanocrystals. The model combines Monte Carlo and drift-diffusion algorithms to simulate the sputtering of atoms from the target, their thermalization in the buffer gas, and gas phase nucleation reactions. Densities of clusters having one to many hundreds of atoms are obtained as a function of position in the discharge. We find that the experimentally observed particle sizes cannot be explained by clustering involving solely neutral reactants due to their short residence times in the plasma. Negatively charged clusters which are trapped in the plasma have correspondingly longer residence times and most likely are responsible for the growth of large particles. Scaling laws for the growth of homogeneous clusters will be presented based on the results of the model.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 206: Symposium G – Clusters and Cluster-Assembled Materials , 1990 , 283
Copyright
Copyright © Materials Research Society 1991

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References

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