Selectively grown carbon nanotubes (CNTs) and/or vertically aligned CNTs (VACNTs) on patterned metal electrodes have been prepared for applications to a novel electronic-measuring nano-probe. We propose newly a position-controlling method of CNTs by controlling not only a position of catalysts but also the thickness of metal underlayers for the catalysts. The selective growth of CNTs was achieved at edges of the metal pattern by thermal chemical vapor deposition. The width of selectively grown CNTs was minimized, about 2.6 µm. The width was about 80 times as small as that of the metal pattern. VACNTs were synthesized by a plasma enhanced CVD method in which the high electric field in a cathode dark space was applied to the substrates. The VACNTs grew up, however, all over the metal pattern.