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Room Temperature Hydrogen Gas Sensitivity of Nanocrystalline-Doped Tin Oxide Sensor Incorporated into MEMS Device
Published online by Cambridge University Press: 01 February 2011
Abstract
Nanocrystalline indium oxide (In2O3)-doped tin oxide (SnO2) thin film sensor has been sol-gel dip-coated on a microelectromechanical systems (MEMS) device. The micro-sensor device is successfully utilized to sense ppm level H2 at room temperature with high sensitivity. The chamber pressure has no pronounce effect on the room temperature H2 sensitivity.
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- Copyright © Materials Research Society 2005