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Room Temperature Hydrogen Gas Sensitivity of Nanocrystalline-Doped Tin Oxide Sensor Incorporated into MEMS Device

Published online by Cambridge University Press:  01 February 2011

Satyajit Shukla ,
Rajnikant Agrawal ,
Lawrence Ludwig ,
Hyoung Cho  and
Sudipta Seal
Satyajit Shukla
Affiliation:
University of Central Florida (UCF), Mechanical Materials Aerospace Engineering (MMAE) Department and Advanced Materials Processing and Analysis Center (AMPAC), Engineering # 381, 4000 Central Florida Blvd. Orlando, FL 32816, Phone: (407) 823–5227, Fax: (407) 823–0208, E-mail(s): sshukla@pegasus.cc.ucf.edu, sseal@pegasus.cc.ucf.edu
Rajnikant Agrawal
Affiliation:
University of Central Florida (UCF), Mechanical Materials Aerospace Engineering (MMAE) Department and Advanced Materials Processing and Analysis Center (AMPAC), Engineering # 381, 4000 Central Florida Blvd. Orlando, FL 32816, Phone: (407) 823–5227, Fax: (407) 823–0208, E-mail(s): sshukla@pegasus.cc.ucf.edu, sseal@pegasus.cc.ucf.edu
Lawrence Ludwig
Affiliation:
Kennedy Space Center (KSC-NASA), FL 32899
Hyoung Cho
Affiliation:
University of Central Florida (UCF), Mechanical Materials Aerospace Engineering (MMAE) Department and Advanced Materials Processing and Analysis Center (AMPAC), Engineering # 381, 4000 Central Florida Blvd. Orlando, FL 32816, Phone: (407) 823–5227, Fax: (407) 823–0208, E-mail(s): sshukla@pegasus.cc.ucf.edu, sseal@pegasus.cc.ucf.edu
Sudipta Seal
Affiliation:
University of Central Florida (UCF), Mechanical Materials Aerospace Engineering (MMAE) Department and Advanced Materials Processing and Analysis Center (AMPAC), Engineering # 381, 4000 Central Florida Blvd. Orlando, FL 32816, Phone: (407) 823–5227, Fax: (407) 823–0208, E-mail(s): sshukla@pegasus.cc.ucf.edu, sseal@pegasus.cc.ucf.edu
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Abstract

Nanocrystalline indium oxide (In2O3)-doped tin oxide (SnO2) thin film sensor has been sol-gel dip-coated on a microelectromechanical systems (MEMS) device. The micro-sensor device is successfully utilized to sense ppm level H2 at room temperature with high sensitivity. The chamber pressure has no pronounce effect on the room temperature H2 sensitivity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A1.6
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

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