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Quantitative Studies of Glow-Discharge Deposition Using Optical Emission Spectroscopy
Published online by Cambridge University Press: 21 February 2011
Abstract
Intensities of CH optical emission and electrical properties of methane rf discharges as a function of pressure are presented and discussed. The results are consistent with a model in which the properties of the discharge are dominated by secondary electrons traversing the gap between the electrodes.
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- Copyright © Materials Research Society 1985
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