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Precursor Delivery for the Deposition of Superconducting Oxides: a Comparison Between Solid Sources and Aerosol

Published online by Cambridge University Press:  15 February 2011

O. Thomas ,
F. Weiss ,
J. Hudner ,
R. Haase ,
C. Dubourdieu ,
E. Mossang ,
N. Didier  and
J.P. Senateur
O. Thomas
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
F. Weiss
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
J. Hudner
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
R. Haase
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
C. Dubourdieu
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
E. Mossang
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
N. Didier
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
J.P. Senateur
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA CNRS 1109, ENSPG, BP46, 38402 St Martin d'Hères, France
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Abstract

Epitaxial thin layers of YBa 2Cu 3O7−x (Tc=90 K, Jc (OT, 77 K) = 2 106 A cm-2) were synthesised by thermal decomposition (750 − 830 °C) of tetramethylheptanedionates of yttrium, barium and copper in the presence of oxygen. Three different precursor delivery systems have been used: In the first, the precursor's surface is flushed with the carrier gas (Ar), in the second, argon is directly injected through the powder leading to a much higher transport rate, and in the third, a liquid (diketonates in a solvent) is nebulized via a piezoelectric transducer. The transport and deposition rates obtained in these three different reactors will be compared.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 335: Symposium Y – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics , 1993 , 209
Copyright
Copyright © Materials Research Society 1994

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