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Poly-Si - A Most Important Material

Published online by Cambridge University Press:  21 February 2011

Martin L. Hammond
Martin L. Hammond*
Affiliation:
Lam Research Corp.,49026 Milmont Dr., Fremont, CA 94538
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Abstract

The many advantages of polycrystalline Si (poly-Si) to semiconductor device manufacturing are reviewed, together with methods of deposition and new uses.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 182: Symposium C – Polysilicon Thin Films and Interfaces , 1990 , 3
Copyright
Copyright © Materials Research Society 1990

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