Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-18T16:48:12.767Z Has data issue: false hasContentIssue false
  • English
  • Français

Plasma Diagnostics by Laser-Induced Fluorescence

Published online by Cambridge University Press:  22 February 2011

J. P. Booth ,
G. Hancock ,
N. D. Perry  and
M. Toogood
J. P. Booth
Affiliation:
Oxford University, Physical Chemistry Laboratory, South Parks Road, Oxford, OX1 3QZ, United Kingdom
G. Hancock
Affiliation:
Oxford University, Physical Chemistry Laboratory, South Parks Road, Oxford, OX1 3QZ, United Kingdom
N. D. Perry
Affiliation:
Oxford University, Physical Chemistry Laboratory, South Parks Road, Oxford, OX1 3QZ, United Kingdom
M. Toogood
Affiliation:
Oxford University, Physical Chemistry Laboratory, South Parks Road, Oxford, OX1 3QZ, United Kingdom
Get access

Abstract

RF plasmas of CFM4 have been investigated by laser-induced fluorescence (LIF). Ground state CF2 and CF radicals have been observed under a variety of experimental conditions, where LIF has enabled spatial and temporal distributions to be found. In addition, absolute concentrations have been measured and the processes of radical production and removal have been examined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 117: Symposium C – Process Diagnostics: Materials, Combustion, Fusion , 1988 , 47
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Bischel, W.K., Bamford, D.J. and Jusinski, L.E., Appl. Opt. 25 1215 (1986).CrossRefGoogle Scholar
2. Hargis, P.J., White, R.M. and Gee, J., Springer-Verlag Ser. Chem. Phys. 39 528 (1985).Google Scholar
3. Wentink, T. Jr.. and Isaacson, L., J. Chem. Phys. 46 603 (1967).Google Scholar
4. Callear, A.B., Pilling, M.J. and Smith, I.W.M., Trans. Farad. Soc. 62 2977 (1966).Google Scholar
5. Booth, J.P., Hancock, G. and Perry, N.D., to be published.Google Scholar
6. Booth, J.P., Hancock, G. and Perry, N.D.. Proc. Mat. Res. Soc. Symp. 98 135 (1987).CrossRefGoogle Scholar
7. Plumb, I.C. and Ryan, K.R., Plasma Chem. Plasma Proc. 6 205 (1986).Google Scholar
8. Thoman, J.W. Jr., Suzuki, K., Kable, S.H. and Steinfeld, J.I., J. Appl. Phys. 60 2775 (1986).CrossRefGoogle Scholar