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Physical Properties of Diamond-Like Nanocomposite Films

Published online by Cambridge University Press:  15 February 2011

B. Dorfman ,
M. Abraizov ,
B. Pypkin ,
M. Strongin ,
X.-Q. Yangn ,
D. Yan ,
Fred H. Pollak ,
J. Grow  and
R. Levy
B. Dorfman
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
M. Abraizov
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
B. Pypkin
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
M. Strongin
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
X.-Q. Yangn
Affiliation:
Physics Department, Brookhaven National Laboratory, Upton, NY 11973
D. Yan
Affiliation:
International Institute of Materials and Technology, Polytechnic University, Farmingdale, NY 11735
Fred H. Pollak
Affiliation:
Physics Department and NY State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210
J. Grow
Affiliation:
Physics Department, New Jersey Institute of Technology, Newark, NJ 07201
R. Levy
Affiliation:
Physics Department, New Jersey Institute of Technology, Newark, NJ 07201
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Abstract

Diamond-like nanocomposite (DLN) and metal containing DLN (Me-DLN) films, synthesized in a combined process of deposition of carbon-silicon precursor and magnetron sputtering of a metal target, have been examined by Auger electron spectroscopy, Raman and IR spectroscopy, nanoindentation and internal stress measurements. The stability of the films under ion and electron irradiation and thermal annealing has been tested.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 351: Symposium V – Molecularly Designed Ultrafine/Nanostructured Materials , 1994 , 43
Copyright
Copyright © Materials Research Society 1994

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References

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