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Phase and Disorder Investigations in Boron Nitride Thin Films Grown by Pecvd

Published online by Cambridge University Press:  10 February 2011

L. E. Depero ,
L. Sangaletti ,
C. Schaffnit ,
F. Rossi  and
P. N. Gibson
L. E. Depero
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali, Università di Brescia, Via Branze, 38–25123 Brescia, Italy
L. Sangaletti
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali, Università di Brescia, Via Branze, 38–25123 Brescia, Italy
C. Schaffnit
Affiliation:
Advanced Coating Centre, Joint Research Centre of the European Communities, Petten, P.O.BOX 2, 1755ZG Petten, The Netherlands
F. Rossi
Affiliation:
Advanced Coating Centre, Joint Research Centre of the European Communities, Petten, P.O.BOX 2, 1755ZG Petten, The Netherlands
P. N. Gibson
Affiliation:
Institute for Advanced Materials, Joint Research Centre of the European Communities, Ispra, Italy
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Abstract

Based on X-ray diffraction and infrared spectroscopy measurements, BN thin films grown by PECVD on silicon substrates have been studied with the aim of identifying the thin film phase. In a set of samples, while the infrared spectra showed characteristic bands of the hexagonal phase, X - ray diffraction patterns only displayed reflections belonging to the cubic BN phase. Therefore, structural models have been developed to explain the apparent inconsistency between the two sets of experimental data. In particular, static disorder effects - which have been introduced in the model starting from the sp2 hybridization of the ordered hexagonal phase, as suggested by the infra-red spectroscopy results - allowed a consistent interpretation of the X-ray diffraction patterns. For another set of samples, which also showed a characteristic hexagonal signal in the IR data, the XRD pattern could not be indexed with any of the BN phases. In this case, the presence of molecular and ionic phases, associated with impurities, was considered in structural modeling studies.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 410: Symposium S – Covalent Ceramics III-Science and Technology of Non-Oxides , 1995 , 247
Copyright
Copyright © Materials Research Society 1996

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References

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