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Pd/Au:Be Ohmic Contacts to p-Type GaAs
Published online by Cambridge University Press: 25 February 2011
Abstract
Stable, low resistance ohmic contacts to p-type GaAs were studied for use in semiconductor laser applications. Comparison was made between Cr/Au, Au:Be and Pd/Au:Be metallizations. Regions of P+ were formed in N-type GaAs by a spin-on source which was rapid diffused at 950°C for 6s. Surface doping of 2×1020/cm3 and junction depth of 0.4 μm were determined by SIMS, groove and stain, and electrochemical profile. Metallizations were accomplished by thermal evaporation with a base pressure of 3×10-6 Torr. Sintering of the metallizations was done by furnace or RTA at 350°C. This sintering temperature was selected after RBS studies predicted an absence of significant interdiffusion. Pd/Au:Be yielded the best result of 0.3 μΩ-cm2 based upon transmission line, cross-bridge Kelvin and van der Pauw studies. A layer of BeO was revealed on the surface of Au:Be contacts by Auger studies. Cross-section TEM studies on Pd/Au:Be revealed a uniform layer of alloyed Ga-Au with an absence of spiking.
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- Copyright © Materials Research Society 1990
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