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Optical Properties of Microcrystalline Silicon

Published online by Cambridge University Press:  21 February 2011

Martin Ingels ,
Martin Stutzmann  and
Stefan Zollner
Martin Ingels
Affiliation:
Max-Planck-Institut für Festkörperforschung, D-7000 Stuttgart 80, FRG
Martin Stutzmann
Affiliation:
Max-Planck-Institut für Festkörperforschung, D-7000 Stuttgart 80, FRG
Stefan Zollner
Affiliation:
Max-Planck-Institut für Festkörperforschung, D-7000 Stuttgart 80, FRG
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Abstract

Optical properties of undoped, microcrystalline silicon are investigated by photothermal deflection spectroscopy, spectroscopic ellipsometry and Raman scattering. Samples are prepared by recrystallization of hydrogenated amorphous silicon in the temperature range 680 – 900°C. The increase of grain sizes with increasing annealing temperature and the disappearance of amorphous tissue lead to noticeable changes in the observed spectra. It is argued that much of the pertinent structural information of μc-Si can be obtained by a suitable combination of optical measurements alone.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 164: Symposium H – Materials Issues in Microcrystalline Semiconductors , 1989 , 229
Copyright
Copyright © Materials Research Society 1990

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