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A Novel AFM Chip for Fountain Pen Nanolithography - Design and Microfabrication

Published online by Cambridge University Press:  01 February 2011

Keun-Ho Kim ,
Nicolaie Moldovan ,
Changhong Ke  and
Horacio D. Espinosa
Keun-Ho Kim
Affiliation:
Department of Mechanical Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, U.S.A.
Nicolaie Moldovan
Affiliation:
Department of Mechanical Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, U.S.A.
Changhong Ke
Affiliation:
Department of Mechanical Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, U.S.A.
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Abstract

A novel atomic force microscopy (AFM) probe has been developed to expand the capability and applications of dip-pen nanolithography (DPN) technology. This new probe has integrated microchannels and reservoirs for continuous ink feed, which allow “fountain-pen” writing called “Fountain Pen Nanolithography” (FPN). Ink is transported from the reservoirs through the microchannels and eventually dispensed onto substrates via a volcano-like dispensing tip. Numerical simulations have been performed to select optimal materials and suitable tip shapes providing a stable fluid-air interface in the tip. Microchannel and dispensing tip have been fabricated by surface micromachining, in particular employing 3 layers of thin films. Fluid flow through the microchannels has been experimentally examined. The probe was used to write on a gold substrate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 782: Symposium A – Micro- and Nanosystems , 2003 , A5.56
Copyright
Copyright © Materials Research Society 2004

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References

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