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A New Development Of Scanning Hydrogen Imaging System And Its Application

Published online by Cambridge University Press:  10 February 2011

Kazuyuki Ueda ,
Ken'ichi Ishikawa  and
Masamichi Yoshimura
Kazuyuki Ueda
Affiliation:
Toyota Technological Institute, Hisakata 2-Chome, Tempaku, Nagoya 468-8511, Japan
Ken'ichi Ishikawa
Affiliation:
Toyota Technological Institute, Hisakata 2-Chome, Tempaku, Nagoya 468-8511, Japan
Masamichi Yoshimura
Affiliation:
Toyota Technological Institute, Hisakata 2-Chome, Tempaku, Nagoya 468-8511, Japan
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Abstract

Scanning type electron-stimulated desorption (ESD) spectroscopy to detect hydrogen on solid surfaces has been described. To analyze a two-dimensional distribution of hydrogen on solid surface, a pencil-type fine-focused electron gun, of which spot size is less than 300 nm at 800 eV, has been developed using a thermal field emitter. The lateral resolution of analysis is achieved less than 1 μm.

Letters were drawn on a hydrogen-terminated Si(100) surface by irradiation of continuous electron beam to remove hydrogen from the surface, and by the following scanning ESD measurement, a clear letters were confirmed on this surface. Direct lithography by an electron beam on silicon surfaces has been realized.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 513: Symposium H – Hydrogen in Semiconductors and Metals , 1998 , 17
Copyright
Copyright © Materials Research Society 1998

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References

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