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Nanoindentation of Vacuum Ultraviolet Light-Irradiated Poly(methylmethacrylate) Substrates

Published online by Cambridge University Press:  11 February 2011

Atsushi Hozumi
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 2266–98 Anagahora, Shimo-shidami, Moriyama-ku, Nagoya 463–8560, Japan
Yoshiyuki Yokogawa
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 2266–98 Anagahora, Shimo-shidami, Moriyama-ku, Nagoya 463–8560, Japan
Tetsuya Kameyama
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), 2266–98 Anagahora, Shimo-shidami, Moriyama-ku, Nagoya 463–8560, Japan
Yunying Wu
Affiliation:
Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–8603, Japan.
Hiroyuki Sugimura
Affiliation:
Department of Materials Processing Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–8603, Japan.
Osamu Takai
Affiliation:
Center for Integrated Research in Science and Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–8603, Japan.
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Abstract

Surface modification of poly(methylmethacrylate) (PMMA) substrates has been demonstrated using an excimer lamp radiating vacuum ultraviolet (VUV) light of 172 nm in wavelength. In this study, we have particularly focused on the effects of atmospheric pressure during VUV irradiation. Each of the substrates was photoirradiated with VUV light under a pressure of 10, 103 or 105 Pa. Changes in nanomechanical properties of the VUV-irradiated sample surfaces were studied based on a scratching test using a nanoindenter. The wear-depth of the PMMA sample treated at 105 Pa was about 137.0 nm, which was much larger than the wear-depth of an untreated PMMA substrate (63.3 nm). On the contrary, when samples were prepared with VUV irradiation conducted at 10 and 103 Pa, their wear-depths markedly decreased down to about 2.2 and 12.5 nm, respectively. The sample treated at 10 Pa was particularly wear-resistant. This high wear-resistance was attributable to the formation of new carbon-carbon bonds such as C=C bonds on the PMMA surfaces.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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References

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