Hostname: page-component-84b7d79bbc-rnpqb Total loading time: 0 Render date: 2024-07-29T14:51:23.645Z Has data issue: false hasContentIssue false
  • English
  • Français

Nanocomposite Conductive Elastomer: Microfabrication Processes and Applications in Soft-Matter MEMS Sensors

Published online by Cambridge University Press:  01 February 2011

Chang Liu
Chang Liu*
Affiliation:
changliu@uiuc.edu, University of Illinois at Urbana-Champaign, Micro and Nanotechnology Laboratory, 208 North Wright Street, Urbana, IL, 61801, United States, 1-217-333-4051
Get access

Abstract

3D micro-molded PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, traditional PDMS is non-conductive and as a result is used in mostly structural applications. It is difficult to embed elastomeric, “stretchy” conductors and transduction elements in molded PDMS matrix. We report general methods for monolithic fabrication of multi-layer PDMS structures with embedded conductive and non-conductive elastomer elements. Conductive PDMS parts, made of carbon-nanotube-filled composite PDMS, can form internal elastomer wires, electrodes, heaters, and sensors. The process uses a series of PDMS patterning, micromolding, and bonding techniques. In this work we demonstrate elastomer strain gauges, capacitive pressure sensors, as well as microfluidic channels with integrated heaters and sensors.

Keywords

microelectro-mechanical (MEMS)machiningnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 947: Symposium A – Responsive Soft Matter – Chemistry and Physics for Assemblages, Films and Forms , 2006 , 0947-07-01
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Chen, J. and Tsubokawa, N., “Novel Gas Sensor from Polymer-Grafted Carbon Black: Vapor Response of Electric Resistance of Conducting Composites Prepared from Poly(ethylene-block-ethylene-oxide)-Grafted Carbon Black,” Journal of Applied Polymer Science, vol.77, pp. 2437–2447, 1999. [2] E. Segal, R. Tchoudakov, M. Narkis , and A. Siegmann, “Sensing of liquids by electrically conductive immiscible polypropylene / thermoplastic polyurethane blends containing carbon black,” Journal of Polymer Science: B, vol.41, pp. 1428–40, 2003.Google Scholar
[2] Segal, E., Tchoudakov, R., Narkis, M., and Siegmann, A., “Sensing of liquids by electrically conductive immiscible polypropylene / thermoplastic polyurethane blends containing carbon black,” Journal of Polymer Science: B, vol.41, pp. 1428–40, 2003.Google Scholar
[3] Engel, J. M., Chen, J., Bullen, D., and Liu, C., “Polyurethane Rubber as a MEMS Material: Characterization and Demonstration of an All-Polymer Two-Axis Artificial Haircell Flow Sensor,” presented at IEEE International Conference on MEMS, 2005.Google Scholar
[4] Buma, T., Spisar, M., and O'Donnell, M., “A high frequency ultrasound array element using thermoelastic expansion in PDMS,” presented at IEEE Ultrasonics Symposium, 2001.Google Scholar
[5] Ryu, K., Wang, X., Shaikh, K., and Liu, C., “A method for precision patterning of silicone elastomer and its applications,” Journal of Microelectromechanical Systems, vol.13, pp. 568–575, 2004.Google Scholar