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Multiscale 3D Patterning of Nanoparticle Assemblies for Plasmonic Devices

Published online by Cambridge University Press:  17 April 2019

R. Carles ,
C. Farcau ,
G. Benassayag ,
C. Bonafos ,
P. Benzo ,
L. Cattaneo ,
B. Pecassou  and
A. Zwick
R. Carles
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
C. Farcau
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
G. Benassayag
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
C. Bonafos
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
P. Benzo
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
L. Cattaneo
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
B. Pecassou
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
A. Zwick
Affiliation:
Groupe Nanomat – CEMES-CNRS – Université de Toulouse, 29 rue Jeanne Marvig, BP 94347, 31055 Toulouse Cedex 4, France
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Abstract

We have developed a novel strategy for elaborating composite plasmonic nanomaterials in a well controlled manner. Combining several techniques commonly used in microelectronic engineering, namely sputtering deposition, thermal oxidation, ultra low energy ion implantation, focused ion beam lithography, thermal or laser annealing, we have obtained 3D patterned optical layers. Their spatial and spectral responses take benefit of optical interference, plasmonic resonance effects and coupling between excitations in both near and far field regime. Moreover these structures show high level of uniformity, reproducibility and stability, and they preserve flat and chemically uniform surfaces.

Keywords

nanostructureRaman spectroscopyion-beam processing
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1248: Symposium D – Solution Processing of Inorganic and Hybrid Materials for Electronics and Photonics , 2010 , 1248-D09-09
Copyright
Copyright © Materials Research Society 2010

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