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Modification of The Optical Properties of Al2O3 by Ion Implantation

Published online by Cambridge University Press:  25 February 2011

C. W. White ,
D. K. Thomas ,
R. A. Zuhr ,
J. C. McCallum ,
A. Pogany ,
R. F. Haglund ,
R. H. Magruder  and
L. Yang
C. W. White
Affiliation:
Oak Ridge National Laboratory, P. 0. Box 2008, Oak Ridge, TN 37831-6057
D. K. Thomas
Affiliation:
Oak Ridge National Laboratory, P. 0. Box 2008, Oak Ridge, TN 37831-6057
R. A. Zuhr
Affiliation:
Oak Ridge National Laboratory, P. 0. Box 2008, Oak Ridge, TN 37831-6057
J. C. McCallum
Affiliation:
Royal Melbourne Institute of Technology, Microelectronics and Materials Technology Centre, Melbourne, Australia
A. Pogany
Affiliation:
Royal Melbourne Institute of Technology, Microelectronics and Materials Technology Centre, Melbourne, Australia
R. F. Haglund
Affiliation:
Vanderbilt University, Department of Physics and Astronomy, Nashville, TN
R. H. Magruder
Affiliation:
Vanderbilt University, Department of Physics and Astronomy, Nashville, TN
L. Yang
Affiliation:
Vanderbilt University, Department of Physics and Astronomy, Nashville, TN
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Abstract

The implantation of Au into A1203 followed by thermal annealing at 1100°C leads to dramatic changes in the optical properties. The linear and nonlinear optical properties are correlated to the presence of small Au precipitates which form during annealing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 268: Symposium K – Materials Modification by Energetic Atoms and Ions , 1992 , 331
Copyright
Copyright © Materials Research Society 1992

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References

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