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Minimization of Non-Uniform Ion-Thinning Effects in Thin Film Transverse Specimens for Transmission Electron Microscopy

Published online by Cambridge University Press:  21 February 2011

F. Shaapur  and
K. A. Watson
F. Shaapur
Affiliation:
National Facility for High Resolution Electron Microscopy, Center for Solid State Science, Arizona State University, Tempe, AZ 85287
K. A. Watson
Affiliation:
National Facility for High Resolution Electron Microscopy, Center for Solid State Science, Arizona State University, Tempe, AZ 85287
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Abstract

A computer-controlled, specimen rotation attachment was developed and installed on a commercial ion-milling system for TEM specimen preparation. This rotation method produced relatively large thin areas on a variety of thin film transverse specimens with a difference in the ion-milling rates between the film and the substrate. The results were generally comparable to those obtained by a newly developed low-angle ion-thinning procedure and the overall processing time was considerably shortened.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 254: Symposium W – Specimen Preparation for Transmission Electron Microscopy of Materials III , 1991 , 153
Copyright
Copyright © Materials Research Society 1992

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References

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