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Microtribological Studies by Using Atomic Force and Friction Force Microscopy and its Applications

Published online by Cambridge University Press:  21 February 2011

Bharat Bhushan ,
Vilas N. Koinkar  and
J. Ruan
Bharat Bhushan
Affiliation:
Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, OH 43210-1107
Vilas N. Koinkar
Affiliation:
Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, OH 43210-1107
J. Ruan
Affiliation:
Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, OH 43210-1107
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Abstract

We have used atomic force microscopy (AFM) and friction force microscopy (FFM) techniques for microtribological studies including microscale friction, nanowear, nanoscratching and nanoindentation hardness measurements. The microscale friction studies on a gold ruler sample demonstrated that the local variation in friction correspond to a change of local surface slope, and this correlation is explained by a friction mechanism. Directionality effect is also observed as the sample was scanned in either direction. Nanoscratching, nanowear and nanoindentation hardness studies were performed on single-crystal silicon. Wear rates of single crystal silicon are approximately constant for various loads and test duration. Nanoindentation hardness studies show that AFM technique allows the hardness measurements of surface monolayers and ultra thin films in multilayered structures at very shallow depths and low loads. The AFM technique has also been shown to be useful for nanofabrication.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 332: Symposium U – Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy , 1994 , 93
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1. Binning, G., Rohrer, H., Gerber, Ch. and Weibel, E., Phys. Rev. Lett., 49 (1), 57 (1982).CrossRefGoogle Scholar
2 Binning, G., Quate, C.F. and Gerber, Ch., Phys. Rev. Lett., 56 (9), 930 (1986).CrossRefGoogle Scholar
3 Mate, C.M., McClelland, G.M., Erlandsson, R. and Chiang, S., Phys. Rev. Lett., 59 (17), 1942 (1987).CrossRefGoogle Scholar
4 Ruan, J. and Bhushan, B., Trib, J.., Trans, ASME (1994) (in press).Google Scholar
5. Bhushan, B. and Ruan, J., J. Trib., Trans, ASME (1994) (in press).Google Scholar
6. Petersen, K.E., Proc. IEEE, 70 (5), 420 (1982).Google Scholar
7. Bhushan, B. and Venkatesan, S., Adv. Info. Storage Syst., 5, 211 (1993).Google Scholar
8. Lazzari, J.P. and Deroux-Dauphin, P., IEEE Trans. Mag., 25 (5), 3190 (1989).CrossRefGoogle Scholar
9. Bhushan, B., Dominiak, M. and Lazzari, J.P., IEEE Trans. Mag., 28, 2874 (1992).CrossRefGoogle Scholar
10. Bhushan, B. and Venkatesan, S., J. Mater. Res., 8, 1611 (1993).Google Scholar
11. Venkatesan, S. and Bhushan, B., Adv. Info. Storage. Syst., 5, 243 (1993); Wear (1994) (in press).Google Scholar
12. Gupta, B.K., Chevallier, J. and Bhushan, B., J. Trib. Trans. ASME, 115, 392 (1993); Trib. Trans. (1994) (in press).CrossRefGoogle Scholar
13. Bhushan, B., Koinkar, V.N. and Ruan, J., J. Eng. Trib., Proc. I. Mech. E.(1994) (in press).Google Scholar
14. Makinson, K.R., Trans. Faraday Soc., 44, 279 (1948).CrossRefGoogle Scholar
15. Bowden, F.P. and Tabor, D., The Friction and Lubrication of Solids, (Clarendon Press Oxford, 1950), p. 172.Google Scholar
16. Pharr, G.M., Oliver, W.C. and Clarke, D.R., J. Electronic Mat., 19 (9), 881 (1990).Google Scholar