Article contents
Microstructures of Polysilicon
Published online by Cambridge University Press: 22 February 2011
Abstract
Some typical microstructural studies of polycrystalline silicon using transmission electron microscopy (TEM) are described, including the application of this material for assisting TEM investigations themselves. Examples include oxidation and realignment of polysilicon thin films, the structure of polysilicon in EEPROM devices, polysilicon in trench capacitors and measurement of SiO2 layer thicknesses with polysilicon overlayers. It is also shown tha grain growth in heavily phosphorus doped polysilicon films can be followed by in situ heating in the TEM.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1988
References
REFERENCES
- 4
- Cited by