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Microstructural Study of Ultraviolet-Assisted Pulse Laser depoisted Indium Tin Oxide Films

Published online by Cambridge University Press:  01 February 2011

Nabil D. Bassim ,
Valentin Craciun ,
Doina Craciun  and
Rajiv K. Singh
Nabil D. Bassim
Affiliation:
Department of Materials Science and Engineering, University of Florida Gainesville, FL 32611, U.S.A.
Valentin Craciun
Affiliation:
Department of Materials Science and Engineering, University of Florida Gainesville, FL 32611, U.S.A.
Doina Craciun
Affiliation:
National Institute for Laser, Plasma and Radiation Physics, Bucharest, Romania
Rajiv K. Singh
Affiliation:
National Institute for Laser, Plasma and Radiation Physics, Bucharest, Romania
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Abstract

Indium tin oxide is one of the most used transparent conducting oxides. In order to reduce the processing thermal budget and enhance compatibility of these films for such applications as transparent electrodes for solar cells and flat panel displays, lower deposition temperatures are desirable. The addition of a non-thermal energy source during deposition, in this case, a mercury lamp, has the ability to lower the required substrate temperature during processing while increasing the oxygen content of the deposited film through the added contribution of ionized species into the deposited material. We investigated the microstructure of UV-assisted pulsed laser deposited indium tin oxide films. Comparisons between the UV and non-UV films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 721: Symposia E/J – Texture and Microstructure in Electronic and Magnetic Films – Nanostructural Magnetic Materials for Data Storage , 2002 , J6.3
Copyright
Copyright © Materials Research Society 2002

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