Article contents
Microinstrument for the Characterization of Submicron Silicon Fibers at High Strain
Published online by Cambridge University Press: 10 February 2011
Abstract
We present a MEMS microinstrument to interface submicron-scale structures and study their properties. Using this microinstrument integrated with a 150nm diameter silicon fiber that has high fracture strength and a high force micro-actuator, the non-linearity of n-type silicon's piezoresistive effect is measured up to the third order, using data from the high strain range of 0-1% for the first time.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2000
References
- 1
- Cited by