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Micro Sensor Operating at Room Temperature

Published online by Cambridge University Press:  01 February 2011

Song-Kap Duk  and
Duk-Dong Lee
Song-Kap Duk
Affiliation:
School of Electrical Engineering and Computer Science, Kyungpook National University, Daegu, Korea
Duk-Dong Lee
Affiliation:
School of Electrical Engineering and Computer Science, Kyungpook National University, Daegu, Korea
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Abstract

In the study, low power micro gas sensors operated at room temperature for the detection of NH3 and NOx gases are proposed. As candidate material of gas sensor for NH3 gas detection at room temperature, polyaniline(PANi) synthesized by chemical polymerization was selected. And Te(Tellurium) thin film was used for NOx gas detection at room temperature. By using these sensing materials, micro gas sensors for room temperature operation were prepared and measured the response characteristics for NH3 and NOx.

In case of PANi sensor, the structure was inverted staggered FET type having advantage of useful one for Lab-On-a-Chip. The operating principle of the sensor is based on the change in work function of PANi film caused by adsorption of gas molecules in air on the film surface. The change in work function was measured indirectly from that in gate voltage of the FET device. The responses to various gases (NH3, CH4, Methanol and CH3CN) were obtained in gate voltage step mode in R.H. 30%. And in case of Te sensor, the sensing material was thermally evaporated on glass substrate. The thickness and annealing temperature were 500 Å −2000 Å and 100 °C −300 °C, respectively. The Te-based micro gas sensor exhibited high sensitivity to NOx and good selectivity against CO and hydro-carbon gases. And by adding Ti to Te film, the sensor has a good selectivity to CO gas.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A7.1
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

1. Oh, E. J., Chemworld, Vol.33, No. 5, pp. 328–337, 1993.Google Scholar
2. Koudelka-Hep, M. G. H. M., Sensors and Actuators B, Vol. 68, Issues 1–3, pp. 331–334, 2000.Google Scholar
3. Skotheim, T. A., Reynolds, J. R., Marcel pekker Inc, pp.1015–1026, 1998.Google Scholar
4. Wong, K.K.L., Hiroyuki, Hiraoka, Semicon. Electronics, ICSE ‘96 Procs., pp.217–220, 1996.Google Scholar
5. Karthigeyan, A., Eisele, I, Sensors and Actuators B, Vol 85, pp.145–153, 2002.Google Scholar
6. Andreev, S. K., Sensors and Actuators B: Chemical, Volume 19, Issues 1–3, 1994, pp. 540–542 Google Scholar
7. Zubkans, J., Lundstrom, I., Solid-State Sensors and Actuators, 1995 Google Scholar
8. Marian, S., Liess, H.-D., Sensors and Actuators B, vol.78, pp.191–194, 2001.Google Scholar
9. Tsiulyanu, D., Liess, H.-D., Sensors and Actuators B, vol.85, pp.232–238, 2002.Google Scholar
10. Tsiulyanu, D., Liess, H.-D., Sensors and Actuators B, vol.100, pp.380–386, 2004.Google Scholar
11. Popova, L.I., Andreev, S.K., Thin Solid Films, vol.441, pp.25–31, 2003.Google Scholar
12. Kyrsta, Stepan, Kurz, H., Thin Solid Films, vol.398–399, pp.379–384, 2001.Google Scholar
13. Kamboj, M.S., Thangaraj, R., Thin Solid Films, vol.420–421, pp.350–353, 2002.Google Scholar