Hostname: page-component-7bb8b95d7b-dtkg6 Total loading time: 0 Render date: 2024-09-23T22:00:17.546Z Has data issue: false hasContentIssue false
  • English
  • Français

MeV Ion Beam Fabrication of Nanopores

Published online by Cambridge University Press:  01 February 2011

Renato Amaral Minamisawa ,
Robert Lee Zimmerman ,
Claudiu Muntele  and
Daryush ILA
Renato Amaral Minamisawa
Affiliation:
renato@cim.aamu.edu, Center for Irradiation of Materials, Physics, PO box 1447, Normal, AL, 35762, United States, (256) 3725856
Robert Lee Zimmerman
Affiliation:
rlzimm@cim.aamu.edu, Alabama A&M University, Physics, Center for Irradiation of Materials, PO box 1447, Normal, AL, 35762, United States
Claudiu Muntele
Affiliation:
claudiu@cim.aamu.edu, Alabama A&M University, Physics, Center for Irradiation of Materials, PO box 1447, Normal, AL, 35762, United States
Daryush ILA
Affiliation:
ila@cim.aamu.edu, Alabama A&M University, Physics, Center for Irradiation of Materials, PO box 1447, Normal, AL, 35762, United States
Get access

Abstract

We have used MeV ion beams to fabricate nanopores in Poly(tetrafluorethylene-co-perfluoro-(propyl vinyl ether)) (PFA) fluoropolymer membranes. We have developed an in house system to produce nanopores. Using MeV ion beams we developed a method to produce pores from nanometers to one-micron diameter. A thin film of the PFA polymer was mounted to cover a window to a gas filled chamber and then exposed to a uniformly scanned MeV ion beam masked to define the exposed area. The gas leak rate through the fabricated pores was monitored by an in situ RGA system both during and after each bombardment to correlate the leakage with the total area of the pores produced. In this project we used MeV light and heavy ions to best define the pore diameter through each hole and the pore entrance and exit dimensions in the membranes.

Keywords

polymerion-beam processingnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1020: Symposium GG – Ion-Beam-Based Nanofabrication , 2007 , 1020-GG03-06
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Dengming, Xiao; Honglei, Li; Xuguang, Li, Proceedings of the 6th International Conference on Properties and Applications of Dielectric Materials, 1, pag. 310–313, 2000.Google Scholar
[2] Sessler, G.M., Introduction and Physical Principles of Electrets, Spring-Verlag, New York, 1980.Google Scholar
[3] Caplan M., R.; Chiang C., -Y.; Loyd D., R. and Yen L., Y., Journal of Membrane Science, 1997, 130, pp. 219–237.Google Scholar
[4] Apel, P. Yu., Korchev, Yu. E., Siwy, Z., Spohr, R. and Yoshida, M., Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 184, pag. 337–346, 2001.Google Scholar
[5] Li, Jiali, Stein, Derek, McMullan, Ciaran, Branton, Daniel, Aziz, Micheal J. and Golovchenko, Jene A., Nature, 412, pag. 166, 2001.Google Scholar
[6] Stein, Derek, Li, Jiali and Golovchenko, Jene A., Physical Review Letters, 89, pag. 1, 2006.Google Scholar
[7] Milner R, G and Richards, D 2001, J. Microscopy, 202, 66, 2001.Google Scholar
[8] Zeisel, D, Deckert, V, Zenobi, R and Vo-Dinh, T, Chem. Phys. Lett., 283, pag. 381, 1998.Google Scholar
[9] Ferrari, A.C., Robertson, J., Physical Review B, 61, 20 (2000).Google Scholar