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MEMS Energy Harvesting from Low-frequency and Low-g Vibrations

Published online by Cambridge University Press:  30 June 2015

Ruize Xu  and
Sang-Gook Kim
Ruize Xu
Affiliation:
Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
Sang-Gook Kim
Affiliation:
Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
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Abstract

MEMS vibration energy harvesting has been investigated to provide energy to low-power micro-electronic systems and potentially to enable batteryless autonomous systems. While enjoying the small footprint hence the ability to be embedded in other systems, MEMS vibration energy harvesters are working at much higher frequencies and input vibration amplitudes. The mechanical resonator based energy harvesters seem inherently have such high frequency due to the scaling of the device dimension. Lower the working frequency range and input vibration amplitude are possible by optimizing the dimensions of the device. However, we are viewing the problem from a different perspective and proposing a solution based on employing the common material property of the micro-fabricated thin film – residual stress. We found that by taking advantage of the compressive residual stress, a bi-stable mechanical resonator could be built and a new spectrum of dynamics can be brought into energy harvesting, which could lower the working frequency range and input g value. The concepts have been analytically simulated and experimentally verified by a meso-scale model.

Keywords

piezoelectricstructuralthin film
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1782: Symposium P – Nanogenerators and Piezotronics , 2015 , pp. 9 - 14
Copyright
Copyright © Materials Research Society 2015 

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References

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