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Mechanical characterization of “blister” defects on optical oxide multilayers using nanoindentation
Published online by Cambridge University Press: 25 May 2012
Abstract
We characterize “blisters”, defects observed in multilayer dielectric (MLD) coatings after exposure to acid cleaning procedures. Nanoindentation is used to make site-specific indentations across blisters to measure the mechanical response, especially their compliance under different conditions of loading. Two regions of statistically different mechanical response are identified within a blister defect and compared to the undisturbed regions of the MLD coating. The indentation response of blisters can vary across samples, and we suggest reasons for this variation.
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