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Magnetron-Sputtered Metal-Amorphous Silicon Interfaces

Published online by Cambridge University Press:  15 February 2011

W. W. Anderson ,
J. L. Crowley ,
A. D. Jonath ,
H. F. Macmillan ,
W. G. Opyd  and
J. A. Thornton
W. W. Anderson
Affiliation:
Lockheed Research Laboratory, Palo Alto, CA (U.S.A.)
J. L. Crowley
Affiliation:
Lockheed Research Laboratory, Palo Alto, CA (U.S.A.)
A. D. Jonath
Affiliation:
Lockheed Research Laboratory, Palo Alto, CA (U.S.A.)
H. F. Macmillan
Affiliation:
Lockheed Research Laboratory, Palo Alto, CA (U.S.A.)
W. G. Opyd
Affiliation:
Lockheed Research Laboratory, Palo Alto, CA (U.S.A.)
J. A. Thornton
Affiliation:
Telic Corporation, Santa Monica, CA (U.S.A.)
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Extract

Large-area platinum and palladium Schottky barrier solar cells with diode quality factors approaching unity have been fabricated on magnetron-sputterdeposited hydrogenated amorphous silicon (a-Si:H). Measured optical band gaps and barrier heights are comparable with those obtained on glow-dischargeproduced a-Si:H but open-circuit voltages are lower. High surface defect densities are suggested to be responsible for the decrease in Voc.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 10: Symposium C – Thin Films and Interfaces I , 1981 , 311
Copyright
Copyright © Materials Research Society 1982

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References

REFERENCES

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