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Low-Temperature Processing of Sol-Gel Derived Metal Oxide Thin Films using Supercritical Carbon Dioxide Fluid

Published online by Cambridge University Press:  15 March 2011

Hiroshi Uchida ,
Kaori Fujioka  and
Seiichiro Koda
Hiroshi Uchida
Affiliation:
Department of Materials and Life Sciences, Faculty of Science and Technology, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo, 102-8554, Japan
Kaori Fujioka
Affiliation:
Department of Materials and Life Sciences, Faculty of Science and Technology, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo, 102-8554, Japan
Seiichiro Koda
Affiliation:
Department of Materials and Life Sciences, Faculty of Science and Technology, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo, 102-8554, Japan
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Abstract

We demonstrate a novel technique using supercritical carbon dioxide (scCO2) fluid for lowering processing temperature of sol-gel-derived metal oxide thin films. The film processing was performed in a hot-wall closed vessel filled with scCO2 fluid. The effects of fluid temperature and additives on the sol-gel synthesis reaction under scCO2 fluid were also investigated. Precursor films of titanium dioxide (TiO2) prepared on silicon wafer and silica glass by sol-gel coating using Ti-alkoxide were converted to crystalline TiO2 (anatase) films successfully by treatment in scCO2 without additive agent at a fluid pressure of 15 MPa and at a substrate temperature of above 250°C, which is significantly lower than the processing temperature of conventional sol-gel deposition. Furthermore, additive agents such as water (H2O) and nitrogen-oxygen mixture (N2-O2) promoted the decomposition and crystallization of precursor films in scCO2 fluid to form the crystalline TiO2 (anatase) films at a substrate temperature at as low as 200°C although it also produced surface absorbates consisted of hydroxides on the film surface. The experimental results suggested that the hydrolysis and polymerization reactions of Ti-alkoxide in the precursor films were proceeded by the scCO2 processing to form titanium-oxygen (Ti-O) networks and that byproducts such as alcohols were removed from the resulting films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1113: Symposium F – Low-Cost Solution-Based Deposition of Inorganic Films for Electronic/Photonic Devices , 2008 , 1113-F06-27
Copyright
Copyright © Materials Research Society 2009

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