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Low Temperature Metal Organic Chemical Vapor Deposition of Aluminum Oxide Thin Films for Advanced CMOS Gate Dielectric Applications

Published online by Cambridge University Press:  01 February 2011

Spyridon Skordas ,
Filippos Papadatos ,
Zubin Patel ,
Guillermo Nuesca ,
Eric Eisenbraun ,
Evgeni Gusev  and
Alain E. Kaloyeros
Spyridon Skordas
Affiliation:
University at Albany Institute for Materials, School of Nanoscience and Nanoengineering, Albany, NY 12203, U.S.A.
Filippos Papadatos
Affiliation:
University at Albany Institute for Materials, School of Nanoscience and Nanoengineering, Albany, NY 12203, U.S.A.
Zubin Patel
Affiliation:
University at Albany Institute for Materials, School of Nanoscience and Nanoengineering, Albany, NY 12203, U.S.A.
Guillermo Nuesca
Affiliation:
University at Albany Institute for Materials, School of Nanoscience and Nanoengineering, Albany, NY 12203, U.S.A.
Eric Eisenbraun
Affiliation:
University at Albany Institute for Materials, School of Nanoscience and Nanoengineering, Albany, NY 12203, U.S.A.
Evgeni Gusev
Affiliation:
IBM, T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, NY 10598, U.S.A.
Alain E. Kaloyeros
Affiliation:
University at Albany Institute for Materials, School of Nanoscience and Nanoengineering, Albany, NY 12203, U.S.A.
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Abstract

A low-temperature metal organic chemical vapor deposition (MOCVD) process for the growth of aluminum oxide for gate dielectric applications has been developed. Amorphous films were deposited on 200-mm Si(100) wafers, employing an Al β-diketonate precursor [Al(III) 2,4-pentanedionate] and H2O. Chemical and microstructural properties of films grown in a temperature range of 250-450°C were studied using x-ray photo-electron spectroscopy (XPS), xray diffraction (XRD), Rutherford back-scattering spectrometry (RBS), nuclear reaction analysis (NRA), cross-sectional (X) scanning and transmission electron microscopy (XSEM and XTEM). A design of experiment (DOE) method was used for process mapping and optimization. An optimized process window was defined for the growth of dense, amorphous films with carbon and hydrogen inclusion as low as 1 at. % and 3 at. % respectively. Post-deposition annealing studies indicated that chemical and structural film properties are generally stable up to 650°C. The electrical performance of the films was evaluated by capacitance-voltage (C-V) and currentvoltage (I-V) measurements on metal-oxide-semiconductor (MOS) structures. The dielectric constant (k) obtained was 6.7-9.6 (depending on annealing conditions), with equivalent oxide thickness (EOT) as low as 1.3 nm. Leakage current densities lower than that of equivalent SiO2 films were also achieved.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 716: Symposium B – Silicon Materials-Processing, Characterization, and Reliability , 2002 , B4.11
Copyright
Copyright © Materials Research Society 2002

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References

1 Buchanan, D. A., IBM J. Res. Dev. 245, 245 (1999).Google Scholar
2 Hubbard, K. J., and Schlom, D. G., J. Mater. Res., Vol. 11, No. 11, (1996).Google Scholar
3 Wang, C. C., Akbar, S. A., Chen, W., and Patton, V. D., J. Mater. Sci. 1627, 1627 (1995).Google Scholar
4 Wilk, G. D., Wallace, R. M., and Anthony, J. M., J. Appl. Phys. 5243, 5243 (2001).Google Scholar
5 Kim, Y., Park, H., Chun, J. and Lee, W., Thin Solid Films 57, 57 (1994).Google Scholar
6 Ciliberto, E., Fragalà, I., Rizza, R., and Spoto, G., Appl. Phys. Lett. 1624, 1624 (1995).Google Scholar
7 Klein, T., Niu, D. and Parsons, G., Mat. Res. Soc. Symp. Proc. Vol. 445, 445 (1999).Google Scholar
8 Dillon, A. C., Ott, A. W., Way, J. D., George, S. M., Surface Science 322 (1995), 230–242.Google Scholar
9MKS Instruments, Inc., Andover, Massachusetts, http://www.mksinst.com.Google Scholar
10 Gusev, E. P., Lu, H. C., Garfunkel, E. L., Gustafsson, T., Green, M. L., IBM J. Res. Dev. 265, 265 (1998).Google Scholar
11Minitab Inc., State College, Pennsylvania, http://www.minitab.com.Google Scholar