Hostname: page-component-5c6d5d7d68-wtssw Total loading time: 0 Render date: 2024-08-15T10:37:51.187Z Has data issue: false hasContentIssue false
  • English
  • Français

Low temperature deposition of Indium tin oxide (ITO) films on plastic substrates

Published online by Cambridge University Press:  01 February 2011

Vandana Singh ,
B. Saswat  and
Satyendra Kumar
Vandana Singh
Affiliation:
Samtel Center for Display Technologies Indian Institute of Technology Kanpur, India Email:vandanas@iitk.ac.in
B. Saswat
Affiliation:
Samtel Center for Display Technologies Indian Institute of Technology Kanpur, India Email:vandanas@iitk.ac.in
Satyendra Kumar
Affiliation:
Samtel Center for Display Technologies Indian Institute of Technology Kanpur, India Email:vandanas@iitk.ac.in
Get access

Abstract

Organic light emitting diodes (OLEDs) require a transparent conducting oxide (TCO) electrode for injection of charge carriers and the emitted light to come out. In order to exploit the full flexibility of organic semiconductor based large area electronic devices, the deposition of TCO on plastic substrates is essential, which prohibits high temperature processing. Therefore, low temperature deposition of Indium tin oxide (ITO) films is very important for flat panel displays and solar cells. Here we have carried out a systematic study of ITO deposition on plastic substrates using RF magnetron sputtering. For the optimization of structural, electrical and optical properties of ITO, various experiments such as X-ray diffractometer, transmission measurements, sheet resistance and AFM were employed. These properties were investigated as a function of substrate temperature, deposition time and RF power. From these experiments, we obtained a reasonably low sheet resistance (˜ 14;Ω / □) and high transmittance (˜75%) in the visible region on plastic substrates. We also observed that these films are not much affected by atmosphere and does not degrade with time. These ITO films deposited by RF magnetron sputtering on plastic substrates can be use as anode for flexible organic light emitting displays.

Keywords

ITOOLEDPlastic Substrate and Magnetron Sputtering
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 869: Symposium D – Materials, Integration and Technology for Monolithic Instruments , 2005 , D2.9
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Burroughes, J.H., Bradley, D.D.C., Brown, A.R., Marks, R.N., Mackay, K., Friend, R. H., Burns, P.L., Holmes, A.B., Nature (London), 347, 539 (1990).Google Scholar
2 Kim, H., Pique, A., Horwitz, J.S., Mattoussi, H., Murata, Z.H., Kafafi, Z.H.. Chrisey, D.B., Appl. Phys. Lett., 78, 1050 (2001).Google Scholar
3 Hartnagel, H.L., Dawer, A.L., Jain, A.K., Jagdish, C., Semi conducting Transparent Thin Films, Institute of Physics, Philadelphia, 91 (1995).Google Scholar
4 Chopra, K.L., Major, S., Pandya, D.K., Thin Solid Films, 102, 1 (1983).Google Scholar
5 Seki, S., Sawada, Y, Nishide, T., Thin Solid Films, 388, 22 (2001).Google Scholar
6 Kim, H., Horwitz, J.S., Kushto, G., Pique, A., Kafafi, Z.H., Gilmore, C.M., Chrisey, D.B., J. Appl. Phys., 88, 6021 (2000).Google Scholar
7 Hoshi, Y., Ohki, R., Electrochimica Acta, 44, 3927 (1999).Google Scholar
8 Shigesato, Y., Takaki, S., Haranoh, T., J. Appl. Phys., 71 (7), 3356 (1992).Google Scholar
9 Lee, S.B., Pincenti, J.C., Cocco, A., Naylor, D.L., J. Vac. Sci. Tech., A11 (5), 2742 (1993).Google Scholar
10 Shigesato, Y., Paine, D.C., Thin Solid Films, 238, 44 (1994).Google Scholar
11 Oyama, T., Hashimoto, N., Shimizu, J., Akao, Y., Kojima, H., Aikawa, K. and , Suzuki, J. Vac. Sci. Tech. A, 10, 1682 (1992).Google Scholar
12 Kim, H., Horwitz, J.S., Kushto, G.P., Kafafi, Z.H., Chrisey, D.B., Appl. Phys. Lett., 79, 284 (2001).Google Scholar
13 Friend, R. H., Pure Appl. Chem., 73, 425 (2001).Google Scholar
14 Zhu, Furong, J. of SID, 11, 605 (2003).Google Scholar
15 Cairns, D.R., II, R.P.W., Sparacin, D.K., Sachsman, S.M., Paine, D.C., Crawford, G.P., Newton, R.R., Appl. Phys. Lett., 76, 1425 (2000).Google Scholar
16 Bhaumik, Suchandra, Barua, A. K., Jpn. J. Appl. Phys, 42, 3619 (2003).Google Scholar
17 Minami, T., Sonohara, H., Kakumu, T., Takata, S., Thin Solid Films, 270, 37 (1995).Google Scholar
18 Kulkarni, A.K., Knickerbocker, S.A., J. Vac. Sci. Tech. A, 14, 1706 (1996).Google Scholar
19 Buchanan, M., Webb, J.B., Williams, D.F., Appl. Phys. Lett., 37, 213 (1980).Google Scholar
20 Craciun, V., Craciun, D., Wang, X., Anderson, T.J., Singh, R.K., Thin Solid Films, 453, 256 (2004).Google Scholar
21 Lee, H., Kim, I. G., Cho, S.W., Lee, S.H., Thin Solid Films, 302, 25 (1997).Google Scholar