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Laser-Based Area-Selective Processing Techniques for High-Density Interconnects
Published online by Cambridge University Press: 21 February 2011
Abstract
This paper reviews several laser-based area-selective processing techniques developed for high-density multichip interconnection applications. Key material and process requirements for the development of a viable laser-direct-write interconnect technique on polyimide are addressed.
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- Copyright © Materials Research Society 1990
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