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Laser Induced Solid-State Grain Growth in Polysilicon Films

Published online by Cambridge University Press:  25 February 2011

S.A. Ajuria
S.A. Ajuria*
Affiliation:
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
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Abstract

We report studies done on the heating of polysillcon thin films below the melting temperature with long-time (on the order of minutes) continuous-wave laser irradiations. It is shown that a well controlled steady-state temperature is locally established within the film. A thermal model is developed to correlate film temperature to beam intensity and a direct relationship is found. A correlation coefficient of 2.5 K/W/cm2 is empirically determined between film temperature and incident beam power density.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 383
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1 Peery, P.S., Tsao, J.Y, Stiffler, S.R., Thompson, M., Appl. Phys. Lett. 52, 203 (1988).Google Scholar
2 Ortiz, C., Rubin, K. A., Ajuria, S.A., J. Mater. Res., 3(6), 1196 (1988).Google Scholar
3 Bloembergen, N., Mat. Res. Soc. Symp. Proc. 51. H. Kurz, G.L. Olson, J.M. Poate, eds. (North Holland: New York) 71 (1986).Google Scholar
4 Gat., A. Berzberg, L., Gibbons, J.F., Magee, T.J., Hong, J.D., Appl. Phys. Lett., 33, 775(1978).Google Scholar
5 Bartelink, D. J. in "Grain Boundaries in Semiconductors", Mat. Res. Soc. Symp. Proc. Leamy, H.J., Pike, G.E., Seger, C.H., eds. (North Holland: New York), 249 (1982).Google Scholar
6 Carslaw, H.S., Jaeaer, J.C.. Conduction of Heat in Solids (Clarendon Press: Oxford) (1947).Google Scholar
7 Kim, H.J., Thompson, C.V., J. Electrochem. Soc, 135(9), 2312–2318 (1988).Google Scholar
8 Turnbull, D., J. of Metals, Trans. AIME, 651 (August 1951).Google Scholar