Hostname: page-component-848d4c4894-75dct Total loading time: 0 Render date: 2024-05-06T22:06:22.389Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser Induced Nanofabrication on Titanium Thin Films

Published online by Cambridge University Press:  15 February 2011

B.D. Huey ,
D.A. Bonnell ,
A.D. Akhsakhalian ,
A.A. Gorbunov ,
A. Sewing  and
W. Pompe
B.D. Huey
Affiliation:
University of Pennsylvania, Dept. of Materials Science, Philadelphia, PA
D.A. Bonnell
Affiliation:
University of Pennsylvania, Dept. of Materials Science, Philadelphia, PA
A.D. Akhsakhalian
Affiliation:
Institute for Physics of Microstructures, N. Novgorod, Russia
A.A. Gorbunov
Affiliation:
Max-Planck-Gesellschaft, Arbeitsgruppe “Mechanik heterogener Festkorper,” Dresden, Germany.
A. Sewing
Affiliation:
Max-Planck-Gesellschaft, Arbeitsgruppe “Mechanik heterogener Festkorper,” Dresden, Germany.
W. Pompe
Affiliation:
Max-Planck-Gesellschaft, Arbeitsgruppe “Mechanik heterogener Festkorper,” Dresden, Germany.
Get access

Abstract

Illumination of titanium thin films with an argon-ion laser has been used to fabricate nanometer scale features by localized oxidation. The laser induces a temperature gradient in the metal film, within which oxidation may occur. Due to the non-linearity of the reaction with temperature, the reaction zone can be laterally confined to regions narrower than the diffraction limit of optical resolution. Scanning probe microscopy indicates widths ranging from 105 to 600 nm and heights of 0.8 to 30 nm. The possibility of forming novel structures is demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 625
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Wiesendanger, R., Scanning Probe Microscopy and Spectroscopy (Cambridge University Press, 1994, Cambridge), pp. 542–580.Google Scholar
2 LSM model 320, Carl Zeiss GmbH, Oberkochen, Germany.Google Scholar
3 Metev, S.M., Veiko, V.P., Laser-Assisted Microtechnology (Springer-Verlag, Berlin, 1994).Google Scholar
4 Prokhorov, A.M., Konov, V.I., Ursu, I., Mihailescu, I.N., Laser Heating of Metals (Adam Hilger, Philadelphia, 1990).Google Scholar
5 Boyd, I.W., Laser Processing of Thin Films and Microstructures (Springer-Verlag, Berlin, 1987).Google Scholar
6 Kofstad, P., High Temperature Corrosion (Elsevier Science Publishing Company, NY, 1988), pp. 291–294.Google Scholar
7 von Allmen, M., Laser Beam Interactions with Materials (Springer-Verlag, Berlin, 1987).Google Scholar
8 Dimension 3000, Digital Instruments, Santa Barbara, CA.Google Scholar
9 STM 100, Leica Vertrieb GmbH, Germany.Google Scholar
10 Handbook of Chemistry and Physics, edited by Weast, R.C. (The Chemical Rubber Co., Ohio, 1969).Google Scholar
11 JEOL 6400 SEM equipped with Oxford Instruments Link eXL2 EDS system.Google Scholar