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Laser Crystallization and Annealing of Ferroelectric Thin Films
Published online by Cambridge University Press: 15 February 2011
Abstract
Ferroelectric PbZr0.44Ti0.56O3 film with pure ferroelectric phase was fabricated by Ar3+ and KrF laser crystallization technique from as-deposited amorphous films, with the substrate at room temperature. Laser annealing technique was also used to improve the quality of BaTiO3 (BT) films.
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- Copyright © Materials Research Society 1996
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