Hostname: page-component-76fb5796d-skm99 Total loading time: 0 Render date: 2024-04-25T08:33:38.469Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser and Ion Beam Mixing Cr and Ni + Cr Films on Cu.

Published online by Cambridge University Press:  15 February 2011

C. W. Draper ,
D. C. Jacobson ,
J. M. Gibson ,
J. M. Poate ,
J. M. Vandenberg  and
A. G. Cullis
C. W. Draper
Affiliation:
Western Electric Engineering Research Center, Princeton, NJ 08540
D. C. Jacobson
Affiliation:
Bell Laboratories, Murray Hill, NJ 07974
J. M. Gibson
Affiliation:
Bell Laboratories, Murray Hill, NJ 07974
J. M. Poate
Affiliation:
Bell Laboratories, Murray Hill, NJ 07974
J. M. Vandenberg
Affiliation:
Bell Laboratories, Murray Hill, NJ 07974
A. G. Cullis
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs WR 143PS, England
Get access

Abstract

Thin films of Cr and Cr films capped with Ni–8V have been magnetron sputter deposited on both single crystal and polycrystalline Cu and Cu alloy substrates. Surface alloying has been accomplished with scanning second harmonic Q-switched Nd-YAG and single shot Q-switched Ruby lasers and with 1 MeV Xe ions. The films and surface alloys have been characterized with RBS and channeling, AES and sputter profiling, optical microscopy, SEM, TEM and glancing angle XRD. Surface alloys containing as much as 50 at. % Cr have been produced. Following laser melting it is possible to produce substitutional solid solutions of Cr in Cu far in excess of equilibrium values.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 4: Symposium A – Laser and Electron-Beam Interactions with Solids , 1981 , 413
Copyright
Copyright © Materials Research Society 1982

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Draper, C. W., Preece, C. M., Jacobson, D. C., Buene, L. and Poate, J. M. in Proc. of the Materials Research Society – 1979 Annual Meeting, “Laser and Electron Beam Processing of Materials”, ed. by White, C. W. and Peercy, P. S. (Academic Press, New York, 1980) pp. 721–727.CrossRefGoogle Scholar
2. Buene, L., Jacobson, D. C., Nakahara, S., Poate, J. M., Draper, C. W. and Hirvonen, J. K., in Proc. of the Materials Research Society – 1980 Annual Meeting, Vol. 1, “Laser and Electron-Beam Solid Interactions and Materials Processing”, ed. by Gibbons, J. F., Hess, L. D. and Sigmon, T. W. (Elsevier North-Holland, New York, 1981) pp. 583–590.Google Scholar
3. Buene, L., Kaufmann, E. N., McDonald, M. L., Kothaus, J., Vianden, R., Freitag, K. and Draper, C. W. in Proc. of the Materials Research Society – 1980 Annual Meeting, Vol. 3, “Nuclear and Electron Resonance Spectroscopies Applied to Material Science”, ed. by Kaufmann, E. N. and Shenoy, G. K., (Elsevier North-Holland, New York, 1981) pp.391–396.Google Scholar
4. Draper, C. W., Meyer, L. S., Buene, L., Jacobson, D. C. and Poate, J. M., Appl. Surf. Sci. 7, 275 (1981).Google Scholar
5. Buene, L., Poate, J. M., Jacobson, D. C., Draper, C. W. and Hirvonen, J. K., Appl. Phys. Lett. 37, 385 (1980).CrossRefGoogle Scholar
6. Draper, C. W., Kaufmann, E. N. and Buene, L., Surf. Interf. Anal. 3, XXX (1981).Google Scholar
7. Draper, C. W., denBroeder, F. J. A., Jacobson, D. C., Kaufmann, E. N. and Vandenberg, J. M., this volume.Google Scholar
8. Moore, P. G. and McCafferty, E., J. Electrochem. Soc. 128, 1391 (1981).Google Scholar
9. Greco, V. P., Plating and Surf. Finishing, 68, (3), 56 (1981).Google Scholar
10. Guanamuthu, D. S., Opt. Eng. 19, 783 (1980).Google Scholar
11. Hansen, M. and Anderko, K., Constitution of Binary Alloys (McGraw-Hill, New York, 1958) pp. 524–525.Google Scholar
12. Aronson, A. J., Solid State Technol. 21 (12), 66 (1978);Google Scholar
12a Wilson, R. W. and Terry, L. E., J. Vac. Sci. Technol., 13, 157 (1976).Google Scholar
13. Jacobson, D. C., Augustyniak, W. M., Buene, L., Poate, J. M. and Draper, C. W., IEEE Trans. Nucl. Sci. NS–28, 1828 (1981).Google Scholar
14. Frankenthal, R. P., Graedel, T. E. and Draper, C. W., to be published.Google Scholar