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Large-area porous alumina photonic crystals via imprint method

Published online by Cambridge University Press:  01 February 2011

J. Choi ,
J. Schilling ,
K. Nielsch ,
R. Hillebrand ,
M. Reiche ,
R. B. Wehrspohn  and
U. Gösele
J. Choi
Affiliation:
Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany
J. Schilling
Affiliation:
Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany
K. Nielsch
Affiliation:
Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany
R. Hillebrand
Affiliation:
Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany
M. Reiche
Affiliation:
Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany
R. B. Wehrspohn
Affiliation:
Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany
U. Gösele
Affiliation:
Max-Planck-Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany
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Abstract

A perfect 2D porous alumina photonic crystal with 500 nm interpore distance was fabricated on an area of 4 cm2 via imprint methods and subsequent electrochemical anodization. A 4” imprint stamp consisting of a convex pyramid array was obtained by modern VLSI processing using DUV-lithography, anisotropic etching, LPCVD Si3N4 deposition and wafer bonding. The optical properties of the porous alumina photonic crystal were measured with an infrared microscope in Г-M direction. For both polarizations, a bandgap is observed at around 1 μm for r/a = 0.42. A reflectivity of almost unity for E-polarization in the region of the bandgap is a sign of the high quality of the structure, indicating almost no scattering losses. These experimental results could be correlated very well to the bandstructure as well as reflectivity calculations assuming a dielectric constant of å = 2.0 for the anodized alumina.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 722: Symposia K/L – Materials and Devices for Optoelectronics and Photonics – Photonic Crystals-From Materials to Devices , 2002 , L5.2
Copyright
Copyright © Materials Research Society 2002

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References

[1] Joannopoulos, J. D., Meade, R. D. and Winn, J. N., Photonic Crystals (Princeton, NJ: Princeton University Press 1995).Google Scholar
[2] Wijnhoven, JEGJ, Vos, W.L., Science 281, 802 (1998).Google Scholar
[3] Campbell, M., Sharp, D. N., Harrison, M.T., Denning, R. G., Turberfield, A. J., Nature 404, 53(2000).Google Scholar
[4] Sato, T., Miura, K., Ishino, N., Ohtera, Y., Tamamura, T., Kawakami, S. S, Opt. Quant. Electron. 34, 63(2002).Google Scholar
[5] Masuda, H., Ohya, M., Asoh, H., Nakao, M., Nohtomi, M., and Tamamura, T., Jpn. J. Appl. Phys. 38, L1403 (1999).Google Scholar
[6] Masuda, H., Ohya, M., Nishio, K., Asoh, H., Nakao, M., Nohtomi, M., Yokoo, A. and Tamamura, T., Jpn. J. Appl. Phys. 39, L1039 (2000).Google Scholar
[7] Mikulskas, I., Juodkazis, S., Tomaŝiunas, R., and Dumas, J. G., Adv. Mater. 13, 1574 (2001).Google Scholar
[8] Pang, S., Tamamura, T., Nakao, M., Ozawa, A., and Masuda, H., J. Vac. Sci. Technol. B 16, 1145 (1998).Google Scholar
[9] Li, A.-P., Müller, F., and Gösele, U., Electrochem. Solid-State Lett. 3, 131 (2000).Google Scholar
[10] Asoh, H., Nishio, K., Nakao, M., Tamamura, T., Masuda, H., J. Electrochem. Soc. 148, B152 (2001).Google Scholar
[11] Wehrspohn, R.B., Li, A.P., Nielsch, K., F. Müller, Erfurth, W. and Gösele, U., in Oxide Films, Hebert, K.R., Lillard, R.S., Dougall, B.R. Mac eds., PV-2000-4, Electrochemical Society, Pennington, 271, (2000).Google Scholar
[12] Asoh, Masuda H. Watanabe, H. Nishio, M. Nakao, K. Tamamura, M. T. Adv. Mater. 13, 189 (2001).Google Scholar
[13] Translight package, Reynolds, A.L., University of Glasgow (http://userweb.elec.gla.ac.uk/a/areynolds/)Google Scholar