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Investigation of the Role of Chemical-Mechanical Polishing in Improving the Performance of Polysilicon TFTs

Published online by Cambridge University Press:  10 February 2011

B. Lee ,
L.J. Quinn ,
P.T. Baine ,
S.J.N. Mitchell ,
B.M. Armstrong  and
H.S. Gamble
B. Lee
Affiliation:
Northern Ireland Semiconductor Research Centre, Dept. of Electrical and Electronic Engineering, Queen's University Belfast, United Kingdom
L.J. Quinn
Affiliation:
Northern Ireland Semiconductor Research Centre, Dept. of Electrical and Electronic Engineering, Queen's University Belfast, United Kingdom
P.T. Baine
Affiliation:
Northern Ireland Semiconductor Research Centre, Dept. of Electrical and Electronic Engineering, Queen's University Belfast, United Kingdom
S.J.N. Mitchell
Affiliation:
Northern Ireland Semiconductor Research Centre, Dept. of Electrical and Electronic Engineering, Queen's University Belfast, United Kingdom
B.M. Armstrong
Affiliation:
Northern Ireland Semiconductor Research Centre, Dept. of Electrical and Electronic Engineering, Queen's University Belfast, United Kingdom
H.S. Gamble
Affiliation:
Northern Ireland Semiconductor Research Centre, Dept. of Electrical and Electronic Engineering, Queen's University Belfast, United Kingdom
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Abstract

Polycrystalline silicon thin-film transistors (TFTs) have been fabricated on glass substrates using a low temperature top-gate self-aligned process. The interface between the polysilicon active layer and the silicon dioxide oxide gate dielectric is of vital importance in order to achieve good thin-film transistor electrical characteristics. Carrier transport takes place within 10nm of this interface, and any roughness in this region, corresponding to the initial surface roughness of the polysilicon layer, causes scattering of the carriers and a higher density of interface traps. Chemical-mechanical polishing has been used to reduce the initial surface roughness of the polysilicon. Electrical parameters of polished TFTs, such as mobility and threshold voltage, show a marked improvement compared to unpolished devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 558: Symposium B – Flat-Panel Displays and Sensors-Principles, Materials… , 1999 , 257
Copyright
Copyright © Materials Research Society 2000

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References

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