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Interferometric Measurements of Surface Properties During Laser Annealing
Published online by Cambridge University Press: 15 February 2011
Abstract
A simple interferometric method is presented which allows measurement of small vertical displacement of a surface heated by a laser beam. Calculations applied to a silicon crystal in the case of a c.w. laser show reasonable agreement with experiment. The method can be applied to assess surface temperature and thermal constants.
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- Copyright © Materials Research Society 1983