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The Instability of Polycrystalline Thin Films: Experiment and Theory

Published online by Cambridge University Press:  25 February 2011

K. T. Miller ,
F. F. Lange  and
D. B. Marshall
K. T. Miller
Affiliation:
Department of Materials, University of California, Santa Barbara, Santa Barbara, CA 93106
F. F. Lange
Affiliation:
Department of Materials, University of California, Santa Barbara, Santa Barbara, CA 93106
D. B. Marshall
Affiliation:
Rockwell International Science Center, Thousand Oaks, CA 913606
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Abstract

Dense polycrystalline thin films of ZrO2 (3 and 8 mol% Y2O3) were produced by the pyrolysis of zirconium acetate precursor films, which were deposited on single crystal Al2O3 substrates by spin-coating solutions of zirconium acetate. With grain growth, these films broke into islands of ZrO2 grains. Thermodynamic calculations show that this break up lowers the free energy of the system. These calculations also predict the conditions needed for polycrystalline thin film stability.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 121: Symposium H – Better Ceramics Through Chemistry III , 1988 , 823
Copyright
Copyright © Materials Research Society 1988

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References

REFERENCES

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