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Influence of Hydrogen plasma on electrical and optical properties of transparent conductive oxides.

Published online by Cambridge University Press:  01 February 2011

L. Raniero ,
A. Gonçalves ,
A. Pimentel ,
I. Ferreira ,
S. Zhang ,
L. Pereira ,
H. Águas ,
E. Fortunato  and
R. Martins
L. Raniero
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
A. Gonçalves
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
A. Pimentel
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
I. Ferreira
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
S. Zhang
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
L. Pereira
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
H. Águas
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
E. Fortunato
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
R. Martins
Affiliation:
Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa and CEMOP-UNINOVA, Campus da Caparica, 2829-516, Portugal
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Abstract

In this work we study the optical and electrical behavior of ZnO:Ga, ITO and IZO films deposited on glass after sustaining different hydrogen plasma conditions and exposure times. This work was complemented by analyzing the surface morphology of the set of films, which allow us to determine the role of hydrogen plasma on the film's properties such as Hall mobility, free carrier concentration, sheet resistance, optical transmittance, figure of merit and state of the surface. Apart from that, the performances of solar cells using an intrinsic layer constituted by nanocrystalline silicon will be also presented. The data show that the electrical properties of solar cells were improved by using ZnO:Ga as front contact, allowing a high current density collection and single pin solar cells with efficiencies exceeding 11%.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 862: Symposium A – Amorphous and Nanocrystalline Silicon Science and Technology–2005 , 2005 , A21.10
Copyright
Copyright © Materials Research Society 2005

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References

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